 |
|
| |
 |
| |
|
| |
1. Class 1000 cleanroom |
| |
|
| |
2. Fabrication |
| |
Photolithography |
Diffusion Furnace |
Electrochemical Station |
Sputtering |
Belt Furnace |
Screen Printing |
E-Beam |
RTA |
Spray Pyrolysis |
RIE/ICP Etching |
RECVD* |
Spin Coating |
|
| |
|
| |
|
| |
3. Material Characterization |
| |
Lifetime |
FTIR |
Profilometer |
Four Point Probe |
Ellipsometer |
Photoluminescence |
Hall |
Spectrophotometer |
XRD* |
|
| |
|
| |
|
| |
4. Device Characterization |
| |
Solar Simulator
|
Quantum Efficiency
|
I-V
|
Environmental |
LBIC |
C-V |
|
| |
|
| |
|
| |
|
| |
|
